30 Development of Electrostatic Linear Motor for Insect-Type …
439
UC Berkeley Marvell Nanofabrication Laboratory. The authors would like to acknowledge the
Berkeley Sensor and Actuator Center and the UC Berkeley Swarm Lab and Prof. Kristofer S. J.
Pister for their continued support. VLSI Design and Education Center (VDEC), the University of
Tokyo (UTokyo), and Phenitec Semiconductor are acknowledged for CMOS-SOI wafer fabrication. The Japanese Ministry of Education, Sports, Culture, Science and Technology (MEXT) is
acknowledged for financial support through Nanotechnology Platform to UTokyo VDEC used for
the PV cell postprocess. The authors would like to acknowledge the members of Mita Lab and Prof.
Yoshio Mita for their continued support.
References
Li S, Jiang Q, Liu S, Zhang Y, Tian Y, Song C, Wang J, Zou Y, Anderson GJ, Han JY, Chang Y, Liu
Y, Zhang C, Chen L, Zhou G, Nie G, Yan H, Ding B, Zhao Y (2018) A DNA nanorobot functions
as a cancer therapeutic in response to a molecular trigger in vivo. Nature Biotechnol 258–264
Li H, Go G, Seong YK, Park JO, Park S (2016) Magnetic actuated pH-responsive hydrogelbased
soft micro-robot for targeted drug delivery. Smart Mater Struct 25 1–9
Mori M, Lebrasseur KE, Mita Y (2014) Remote power feed and control of MEMS with 58 V
silicon photovoltaic cell made by a CMOS post-process dry release and device isolation method.
In: Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP2014), April
1–4, Cannes, France, 10.1109/DTIP.2014.7056670
Saito K, Contreras DS, Takeshiro Y, Okamoto Y, Hirao S, Nakata Y, Tanaka T, Kawamura S, Kaneko
M, Uchikoba F, Mita Y, Pister KSJ (2019) Study on electrostatic inchworm motor device for a
heterogeneous integrated microrobot system. Trans Japan Inst Electron Packa 12:E18–009–1E18–009–7
Sitti M, Ceylan H, Hu W, Giktinan J, Turan M, Yim S, Diller E (2015) Biomedical applications of
untethered mobile Milli/Microrobots. In: Proceedings of the IEEE, vol 103, No 2
Takeda M (2001) Applications of MEMS to industrial inspection” Technical Digest,” MEMS 2001.
In: 14th IEEE international conference on micro electro mechanical systems, pp 182–191
Takeshiro Y, Okamoto Y, Mita Y (2017) Mask-programmable on-chip photovoltaic cell array. In:
Proceedings of the Power MEMS 2017, November 14–17, Kanazawa, Japan, pp 596–597
Tanaka D, Uchiumi Y, Kawamura S, Takato M, Saito K, Uchikoba F (2017) Four-leg independent
mechanism for MEMS microrobot. Artificial Life and Robotics. September 2017, vol 22, Issue
3, pp 380–384, 10.1007/s10015–017–0365–2
439
UC Berkeley Marvell Nanofabrication Laboratory. The authors would like to acknowledge the
Berkeley Sensor and Actuator Center and the UC Berkeley Swarm Lab and Prof. Kristofer S. J.
Pister for their continued support. VLSI Design and Education Center (VDEC), the University of
Tokyo (UTokyo), and Phenitec Semiconductor are acknowledged for CMOS-SOI wafer fabrication. The Japanese Ministry of Education, Sports, Culture, Science and Technology (MEXT) is
acknowledged for financial support through Nanotechnology Platform to UTokyo VDEC used for
the PV cell postprocess. The authors would like to acknowledge the members of Mita Lab and Prof.
Yoshio Mita for their continued support.
References
Li S, Jiang Q, Liu S, Zhang Y, Tian Y, Song C, Wang J, Zou Y, Anderson GJ, Han JY, Chang Y, Liu
Y, Zhang C, Chen L, Zhou G, Nie G, Yan H, Ding B, Zhao Y (2018) A DNA nanorobot functions
as a cancer therapeutic in response to a molecular trigger in vivo. Nature Biotechnol 258–264
Li H, Go G, Seong YK, Park JO, Park S (2016) Magnetic actuated pH-responsive hydrogelbased
soft micro-robot for targeted drug delivery. Smart Mater Struct 25 1–9
Mori M, Lebrasseur KE, Mita Y (2014) Remote power feed and control of MEMS with 58 V
silicon photovoltaic cell made by a CMOS post-process dry release and device isolation method.
In: Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP2014), April
1–4, Cannes, France, 10.1109/DTIP.2014.7056670
Saito K, Contreras DS, Takeshiro Y, Okamoto Y, Hirao S, Nakata Y, Tanaka T, Kawamura S, Kaneko
M, Uchikoba F, Mita Y, Pister KSJ (2019) Study on electrostatic inchworm motor device for a
heterogeneous integrated microrobot system. Trans Japan Inst Electron Packa 12:E18–009–1E18–009–7
Sitti M, Ceylan H, Hu W, Giktinan J, Turan M, Yim S, Diller E (2015) Biomedical applications of
untethered mobile Milli/Microrobots. In: Proceedings of the IEEE, vol 103, No 2
Takeda M (2001) Applications of MEMS to industrial inspection” Technical Digest,” MEMS 2001.
In: 14th IEEE international conference on micro electro mechanical systems, pp 182–191
Takeshiro Y, Okamoto Y, Mita Y (2017) Mask-programmable on-chip photovoltaic cell array. In:
Proceedings of the Power MEMS 2017, November 14–17, Kanazawa, Japan, pp 596–597
Tanaka D, Uchiumi Y, Kawamura S, Takato M, Saito K, Uchikoba F (2017) Four-leg independent
mechanism for MEMS microrobot. Artificial Life and Robotics. September 2017, vol 22, Issue
3, pp 380–384, 10.1007/s10015–017–0365–2