2. The thickness of SU8 roughly matches that of the 3D
nanoelectrodes, leaving exposed only their nanometer tips (see
Note 5).
3. A plasma etching with high power and low concentration of
oxygen reduces the SU8 thickness to the point that only
approximately 700 nm of the gold nanoelectrode protrude
from the flat substrate.
2.4 Fabrication of
Microfluidic Platform
1. PDMS is used to make the chamber of microfluidic platform,
and a glass ring is bonded on it to create the well in which the
cells are cultured (Fig. 4).
2. A wire is attached to the flat gold substrate with a silver paste
and embedded into the PDMS to be connected to the pulse
generator (see Note 6).
Fig. 3 Schematic and SEM image of the cross section of hollow nanoelectrode
Fig. 4 Top view of PDMS microfluidic platform
16
Jun Yin and Yang Li