66 4 Gas-Phase Synthesis of Nanoparticles
Figure 4.25 Design of an electrodeless radio frequency, RF plasma system. In this design, the
precursor is blown, together with the process gas, axially into the system.
Plasma
RF power supply
Water-cooled
inducƟon coil
Carrier and
process gases
Precursor
feed
Figure 4.26 GeO nanopowder produced
using an industrial, electrodeless RF system.
These three micrographs verify the significant
influence of the quenching conditions on the
particle size of the final product. As a
measure for the particle size, the specific
surface is given. (Courtesy of Tekna Plasma
Systems Inc., Sherbrooke, Québec, J1L 2T9,
Canada).
1 µm
BET surface
9.1 m
2
g
−1
11.0 m
2
g
−1
23.0 m
2
g
−1
lower
Quench gas flow
higher
Figure 4.25 Design of an electrodeless radio frequency, RF plasma system. In this design, the
precursor is blown, together with the process gas, axially into the system.
Plasma
RF power supply
Water-cooled
inducƟon coil
Carrier and
process gases
Precursor
feed
Figure 4.26 GeO nanopowder produced
using an industrial, electrodeless RF system.
These three micrographs verify the significant
influence of the quenching conditions on the
particle size of the final product. As a
measure for the particle size, the specific
surface is given. (Courtesy of Tekna Plasma
Systems Inc., Sherbrooke, Québec, J1L 2T9,
Canada).
1 µm
BET surface
9.1 m
2
g
−1
11.0 m
2
g
−1
23.0 m
2
g
−1
lower
Quench gas flow
higher