382
12 Heterostructures
Fig. 12.46 Highresolution TEM images of
wafer-bonded a Si–Si and
b GaAs–Si interfaces.
White circles indicate the
position of misfit
dislocations. Part (a)
reprinted from [1218],
©2003, with permission
from Elsevier. Part (b)
reprinted with permission
from [1219], ©1998 AIP
Si
GaAs
Si
Si
(a)
(b)