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49. Asadi, K., Li, J., Peshin, S., Yeom, J., Cho, H.: Mechanism of geometric nonlinearity in a
nonprismatic and heterogeneous microbeam resonator. Phys. Rev. B 96(11), 115306 (2017)
50. Chen, D., Wang, Y., Guan, Y., Chen, X., Liu, X., Xie, J.: Methods for nonlinearities reduction
in micromechanical beams resonators. J. Microelectromech. Syst. 27(5), 764–773 (2018)
51. Agarwal, M., Chandorkar, S.A., Candler, R.N., Kim, B., Hopcroft, M.A., Melamud, R., Jha,
C.M., Kenny, T.W., Murmann, B.: Optimal drive condition for nonlinearity reduction in electrostatic microresonators. Appl. Phys. Lett. 89(21), 214105 (2006)
81
48. Jensen, B.D., Mutlu, S., Miller, S., Kurabayashi, K., Allen, J.J.: Shaped comb fingers for tailored
electromechanical restoring force. J. Microelectromech. Syst. 12(3), 373–383 (2003)
49. Asadi, K., Li, J., Peshin, S., Yeom, J., Cho, H.: Mechanism of geometric nonlinearity in a
nonprismatic and heterogeneous microbeam resonator. Phys. Rev. B 96(11), 115306 (2017)
50. Chen, D., Wang, Y., Guan, Y., Chen, X., Liu, X., Xie, J.: Methods for nonlinearities reduction
in micromechanical beams resonators. J. Microelectromech. Syst. 27(5), 764–773 (2018)
51. Agarwal, M., Chandorkar, S.A., Candler, R.N., Kim, B., Hopcroft, M.A., Melamud, R., Jha,
C.M., Kenny, T.W., Murmann, B.: Optimal drive condition for nonlinearity reduction in electrostatic microresonators. Appl. Phys. Lett. 89(21), 214105 (2006)