Nonlinear Dynamics of Resonant Microelectromechanical System (MEMS): A Review
79
4. Hasan, M.H., Alsaleem, F.M., Ouakad, H.M.: Novel threshold pressure sensors based on nonlinear dynamics of MEMS resonators. J. Micromech. Microeng. 28(6), 065007 (2018)
5. Brand, O., Dufour, I., Heinrich, S., Heinrich, S.M., Josse, F., Fedder, G.K., Korvink, J.G.,
Hierold, C., Tabata, O.: Resonant MEMS: Fundamentals, Implementation, and Application.
Wiley (2015)
6. Zhang, W.-M., Yan, H., Peng, Z.-K., Meng, G.: Electrostatic pull-in instability in
MEMS/NEMS: a review. Sens. Actuators A: Phys. 214, 187–218 (2014)
7. Lifshitz, R., Cross, M.: Nonlinear dynamics of nanomechanical and micromechanical resonators. Rev. Nonlinear Dyn. Complex. 1, 1–52 (2008)
8. Rhoads, J.F., Shaw, S.W., Turner, K.L.: Nonlinear dynamics and its applications in micro-and
nanoresonators. In: ASME 2008 Dynamic Systems and Control Conference, pp. 1509–1538.
American Society of Mechanical Engineers Digital Collection (2009)
9. Tiwari, S., Candler, R.N.: Using flexural mems to study and exploit nonlinearities: a review. J.
Micromech. Microeng. 29(8), 083002 (2019)
10. Kumar, V., Yang, Y., Boley, J.W., Chiu, G.T.-C., Rhoads, J.F.: Modeling, analysis, and experimental validation of a bifurcation-based microsensor. J. Microelectromech. Syst. 21(3), 549–
558 (2012)
11. Mahboob, I., Yamaguchi, H.: Piezoelectrically pumped parametric amplification and Q
enhancement in an electromechanical oscillator. Appl. Phys. Lett. 92(17), 173109 (2008)
12. Rhoads, J.F., Shaw, S.W.: The impact of nonlinearity on degenerate parametric amplifiers.
Appl. Phys. Lett. 96(23), 234101 (2010)
13. Yabuno, H.: Self-excited oscillation for high-viscosity sensing and self-excited coupled oscillation for ultra-senseitive mass sensing. Procedia IUTAM 22, 216–220 (2017)
14. Ramos, D., Mertens, J., Calleja, M., Tamayo, J.: Phototermal self-excitation of nanomechanical
resonators in liquids. Appl. Phys. Lett. 92(17), 173108 (2008)
15. Prakash, G., Raman, A., Rhoads, J., Reifenberger, R.G.: Parametric noise squeezing and parametric resonance of microcantilevers in air and liquid environments. Rev. Sci. Instrum. 83(6),
065109 (2012)
16. Younis, M.I.: MEMS Linear and Nonlinear Statics and Dynamics, vol. 20. Springer Science &
Business Media (2011)
17. Zhang, W., Zhang, W., Turner, K.L.: Nonlinear dynamics of micro impact oscillators in high
frequency mems switch application. In: The 13th International Conference on Solid-State
Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS’05,
vol. 1, pp. 768–771. IEEE (2005)
18. Delnavaz, A., Mahmoodi, S.N., Jalili, N., Mahdi Ahadian, M., Zohoor, H.: Nonlinear vibrations
of microcantilevers subjected to tip-sample interactions: theory and experiment. J. Appl. Phys.
106(11), 113510 (2009)
19. Park, Y.-H., Park, K.: High-fidelity modeling of mems resonators. Part I. Anchor loss mechanisms through substrate. J. Microelectromech. Syst. 13(2), 238–247 (2004)
20. Lifshitz, R., Roukes, M.L.: Thermoelastic damping in micro-and nanomechanical systems.
Phys. Rev. B 61(8), 5600 (2000)
21. Sader, J.E.: Frequency response of cantilever beams immersed in viscous fluids with applications to the atomic force microscope. J. Appl. Phys. 84(1), 64–76 (1998)
22. Younis, M.I., Alsaleem, F.M., Miles, R., Su, Q.: Characterization of the performance of capacitive switches activated by mechanical shock. J. Micromech. Microeng. 17(7), 1360 (2007)
23. Hu, S., Raman, A.: Analytical formulas and scaling laws for peak interaction forces in dynamic
atomic force microscopy. Appl. Phys. Lett. 91(12), 123106 (2007)
24. Rhoads, J.F., Shaw, S.W., Turner, K.L.: The nonlinear response of resonant microbeam systems
with purely-parametric electrostatic actuation. J. Micromech. Microeng. 16(5), 890 (2006)
25. Sobreviela, G., Vidal-Álvarez, G., Riverola, M., Uranga, A., Torres, F., Barniol, N.: Suppression
of the af-mediated noise at the top bifurcation point in a mems resonator with both hardening
and softening hysteretic cycles. Sens. Actuators A: Phys. 256, 59–65 (2017)
26. Trusov, A.A., Shkel, A.M.: Capacitive detection in resonant mems with arbitrary amplitude of
motion. J. Micromech. Microeng. 17(8), 1583 (2007)
79
4. Hasan, M.H., Alsaleem, F.M., Ouakad, H.M.: Novel threshold pressure sensors based on nonlinear dynamics of MEMS resonators. J. Micromech. Microeng. 28(6), 065007 (2018)
5. Brand, O., Dufour, I., Heinrich, S., Heinrich, S.M., Josse, F., Fedder, G.K., Korvink, J.G.,
Hierold, C., Tabata, O.: Resonant MEMS: Fundamentals, Implementation, and Application.
Wiley (2015)
6. Zhang, W.-M., Yan, H., Peng, Z.-K., Meng, G.: Electrostatic pull-in instability in
MEMS/NEMS: a review. Sens. Actuators A: Phys. 214, 187–218 (2014)
7. Lifshitz, R., Cross, M.: Nonlinear dynamics of nanomechanical and micromechanical resonators. Rev. Nonlinear Dyn. Complex. 1, 1–52 (2008)
8. Rhoads, J.F., Shaw, S.W., Turner, K.L.: Nonlinear dynamics and its applications in micro-and
nanoresonators. In: ASME 2008 Dynamic Systems and Control Conference, pp. 1509–1538.
American Society of Mechanical Engineers Digital Collection (2009)
9. Tiwari, S., Candler, R.N.: Using flexural mems to study and exploit nonlinearities: a review. J.
Micromech. Microeng. 29(8), 083002 (2019)
10. Kumar, V., Yang, Y., Boley, J.W., Chiu, G.T.-C., Rhoads, J.F.: Modeling, analysis, and experimental validation of a bifurcation-based microsensor. J. Microelectromech. Syst. 21(3), 549–
558 (2012)
11. Mahboob, I., Yamaguchi, H.: Piezoelectrically pumped parametric amplification and Q
enhancement in an electromechanical oscillator. Appl. Phys. Lett. 92(17), 173109 (2008)
12. Rhoads, J.F., Shaw, S.W.: The impact of nonlinearity on degenerate parametric amplifiers.
Appl. Phys. Lett. 96(23), 234101 (2010)
13. Yabuno, H.: Self-excited oscillation for high-viscosity sensing and self-excited coupled oscillation for ultra-senseitive mass sensing. Procedia IUTAM 22, 216–220 (2017)
14. Ramos, D., Mertens, J., Calleja, M., Tamayo, J.: Phototermal self-excitation of nanomechanical
resonators in liquids. Appl. Phys. Lett. 92(17), 173108 (2008)
15. Prakash, G., Raman, A., Rhoads, J., Reifenberger, R.G.: Parametric noise squeezing and parametric resonance of microcantilevers in air and liquid environments. Rev. Sci. Instrum. 83(6),
065109 (2012)
16. Younis, M.I.: MEMS Linear and Nonlinear Statics and Dynamics, vol. 20. Springer Science &
Business Media (2011)
17. Zhang, W., Zhang, W., Turner, K.L.: Nonlinear dynamics of micro impact oscillators in high
frequency mems switch application. In: The 13th International Conference on Solid-State
Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS’05,
vol. 1, pp. 768–771. IEEE (2005)
18. Delnavaz, A., Mahmoodi, S.N., Jalili, N., Mahdi Ahadian, M., Zohoor, H.: Nonlinear vibrations
of microcantilevers subjected to tip-sample interactions: theory and experiment. J. Appl. Phys.
106(11), 113510 (2009)
19. Park, Y.-H., Park, K.: High-fidelity modeling of mems resonators. Part I. Anchor loss mechanisms through substrate. J. Microelectromech. Syst. 13(2), 238–247 (2004)
20. Lifshitz, R., Roukes, M.L.: Thermoelastic damping in micro-and nanomechanical systems.
Phys. Rev. B 61(8), 5600 (2000)
21. Sader, J.E.: Frequency response of cantilever beams immersed in viscous fluids with applications to the atomic force microscope. J. Appl. Phys. 84(1), 64–76 (1998)
22. Younis, M.I., Alsaleem, F.M., Miles, R., Su, Q.: Characterization of the performance of capacitive switches activated by mechanical shock. J. Micromech. Microeng. 17(7), 1360 (2007)
23. Hu, S., Raman, A.: Analytical formulas and scaling laws for peak interaction forces in dynamic
atomic force microscopy. Appl. Phys. Lett. 91(12), 123106 (2007)
24. Rhoads, J.F., Shaw, S.W., Turner, K.L.: The nonlinear response of resonant microbeam systems
with purely-parametric electrostatic actuation. J. Micromech. Microeng. 16(5), 890 (2006)
25. Sobreviela, G., Vidal-Álvarez, G., Riverola, M., Uranga, A., Torres, F., Barniol, N.: Suppression
of the af-mediated noise at the top bifurcation point in a mems resonator with both hardening
and softening hysteretic cycles. Sens. Actuators A: Phys. 256, 59–65 (2017)
26. Trusov, A.A., Shkel, A.M.: Capacitive detection in resonant mems with arbitrary amplitude of
motion. J. Micromech. Microeng. 17(8), 1583 (2007)