Origami MEMS
235
78. Kuribayashi, K., Tsuchiya, K., You, Z., et al.: Self-deployable origami stent grafts as a biomedical application of Ni-rich TiNi shape memory alloy foil. Mater. Sci. Eng. A 419, 131–137
(2006). https://doi.org/10.1016/j.msea.2005.12.016
79. Kwag, H.R., Cho, J.-H., Park, S.-Y., et al.: Self-folding nanostructures with imprint patterned
surfaces (SNIPS). Faraday Discuss. 191, 61–71 (2016). https://doi.org/10.1039/c6fd00021e
80. Laflin, K.E., Morris, C.J., Muqeem, T., Gracias, D.H.: Laser triggered sequential folding of
microstructures. Appl. Phys. Lett. 101 (2012). https://doi.org/10.1063/1.4754607
81. Lahikainen, M., Zeng, H., Priimagi, A.: Reconfigurable photoactuator through synergistic use
of photochemical and photothermal effects. Nat. Commun. 9, 1–8 (2018). https://doi.org/10.
1038/s41467-018-06647-7
82. Lamoureux, A., Lee, K., Shlian, M., et al.: Dynamic kirigami structures for integrated solar
tracking. Nat. Commun. 6, 1–6 (2015). https://doi.org/10.1038/ncomms9092
83. Lamprecht, B., Thünauer, R., Ostermann, M., et al.: Organic photodiodes on newspaper. Phys.
Status Solidi Appl. Mater. Sci. 202, 50–52 (2005). https://doi.org/10.1002/pssa.200510010
84. Lauff, C., Simpson, T.W., Frecker, M., et al.: Differentiating bending from folding in
origami engineering using active materials. In: International Design Engineering Technical
Conferences & Computers and Information in Engineering Conference, pp 1–12 (2014)
85. Lee, B.P., Konst, S.: Novel hydrogel actuator inspired by reversible mussel adhesive protein
chemistry. Adv. Mater. 26, 3415–3419 (2014). https://doi.org/10.1002/adma.201306137
86. Lee, D.W., Phadikar, J., Shankar, M.R.: Multiplicity of shape selection in functionally graded
liquid crystalline polymers. RSC Adv. 7, 23046–23054 (2017). https://doi.org/10.1039/c7r
a03465b
87. Lee, K.M., Smith, M.L., Koerner, H., et al.: Photodriven, flexural-torsional oscillation of
glassy azobenzene liquid crystal polymer networks. Adv. Funct. Mater. 21, 2913–2918 (2011).
https://doi.org/10.1002/adfm.201100333
88. Legrain, A., Berenschot, J.W., Tas, N.R., Abelmann, L.: Capillary origami of micro-machined
micro-objects: Bi-layer conductive hinges. Microelectron. Eng. 140, 60–66 (2015). https://
doi.org/10.1016/j.mee.2015.06.004
89. Lendlein, A., Gould, O.E.C.: Reprogrammable recovery and actuation behaviour of shapememory polymers. Nat. Rev. Mater. 4, 116–133 (2019). https://doi.org/10.1038/s41578-0180078-8
90. Lendlein, A., Jiang, H., Junger, O., Langer, R.: Light-induced shape-memory polymers. Nature
434, 695–697 (2005). https://doi.org/10.1038/nature03438.1
91. Lendlein, A., Shastri, V.P.: Stimuli-sensitive polymers. Adv. Mater. 22, 3344–3347 (2010).
https://doi.org/10.1002/adma.201002520
92. Leong, T.G., Benson, B.R., Call, E.K., Gracias, D.H.: Thin film stress driven self-folding
of microstructured containers. Small 4, 1605–1609 (2008). https://doi.org/10.1002/smll.200
800280
93. Leong, T.G., Lester, P.A., Koh, T.L., et al.: Surface tension-driven self-folding polyhedra.
Langmuir 23, 8747–8751 (2007). https://doi.org/10.1021/la700913m
94. Leong, T.G., Randall, C.L., Benson, B.R., et al.: Tetherless thermobiochemically actuated
microgrippers. Proc. Natl. Acad. Sci. U.S.A. 106, 703–708 (2009). https://doi.org/10.1073/
pnas.0807698106
95. Leong, T.G., Randall, C.L., Benson, B.R., et al.: Self-loading lithographically structured
microcontainers: 3D patterned, mobile microwells. Lab Chip 8, 1621–1624 (2008). https://
doi.org/10.1039/b809098j
96. Liu, F., Urban, M.W.: Recent advances and challenges in designing stimuli-responsive
polymers. Prog. Polym. Sci. 35, 3–23 (2010). https://doi.org/10.1016/j.progpolymsci.2009.
10.002
97. Liu, Y., Boyles, J.K., Genzer, J., Dickey, M.D.: Self-folding of polymer sheets using local
light absorption. Soft Matter 8, 1764–1769 (2012). https://doi.org/10.1039/c1sm06564e
98. Liu, Y., Miskiewicz, M., Escuti, M.J., et al.: Three-dimensional folding of pre-strained
polymer sheets via absorption of laser light. J. Appl. Phys. 115 (2014). https://doi.org/10.
1063/1.4880160
235
78. Kuribayashi, K., Tsuchiya, K., You, Z., et al.: Self-deployable origami stent grafts as a biomedical application of Ni-rich TiNi shape memory alloy foil. Mater. Sci. Eng. A 419, 131–137
(2006). https://doi.org/10.1016/j.msea.2005.12.016
79. Kwag, H.R., Cho, J.-H., Park, S.-Y., et al.: Self-folding nanostructures with imprint patterned
surfaces (SNIPS). Faraday Discuss. 191, 61–71 (2016). https://doi.org/10.1039/c6fd00021e
80. Laflin, K.E., Morris, C.J., Muqeem, T., Gracias, D.H.: Laser triggered sequential folding of
microstructures. Appl. Phys. Lett. 101 (2012). https://doi.org/10.1063/1.4754607
81. Lahikainen, M., Zeng, H., Priimagi, A.: Reconfigurable photoactuator through synergistic use
of photochemical and photothermal effects. Nat. Commun. 9, 1–8 (2018). https://doi.org/10.
1038/s41467-018-06647-7
82. Lamoureux, A., Lee, K., Shlian, M., et al.: Dynamic kirigami structures for integrated solar
tracking. Nat. Commun. 6, 1–6 (2015). https://doi.org/10.1038/ncomms9092
83. Lamprecht, B., Thünauer, R., Ostermann, M., et al.: Organic photodiodes on newspaper. Phys.
Status Solidi Appl. Mater. Sci. 202, 50–52 (2005). https://doi.org/10.1002/pssa.200510010
84. Lauff, C., Simpson, T.W., Frecker, M., et al.: Differentiating bending from folding in
origami engineering using active materials. In: International Design Engineering Technical
Conferences & Computers and Information in Engineering Conference, pp 1–12 (2014)
85. Lee, B.P., Konst, S.: Novel hydrogel actuator inspired by reversible mussel adhesive protein
chemistry. Adv. Mater. 26, 3415–3419 (2014). https://doi.org/10.1002/adma.201306137
86. Lee, D.W., Phadikar, J., Shankar, M.R.: Multiplicity of shape selection in functionally graded
liquid crystalline polymers. RSC Adv. 7, 23046–23054 (2017). https://doi.org/10.1039/c7r
a03465b
87. Lee, K.M., Smith, M.L., Koerner, H., et al.: Photodriven, flexural-torsional oscillation of
glassy azobenzene liquid crystal polymer networks. Adv. Funct. Mater. 21, 2913–2918 (2011).
https://doi.org/10.1002/adfm.201100333
88. Legrain, A., Berenschot, J.W., Tas, N.R., Abelmann, L.: Capillary origami of micro-machined
micro-objects: Bi-layer conductive hinges. Microelectron. Eng. 140, 60–66 (2015). https://
doi.org/10.1016/j.mee.2015.06.004
89. Lendlein, A., Gould, O.E.C.: Reprogrammable recovery and actuation behaviour of shapememory polymers. Nat. Rev. Mater. 4, 116–133 (2019). https://doi.org/10.1038/s41578-0180078-8
90. Lendlein, A., Jiang, H., Junger, O., Langer, R.: Light-induced shape-memory polymers. Nature
434, 695–697 (2005). https://doi.org/10.1038/nature03438.1
91. Lendlein, A., Shastri, V.P.: Stimuli-sensitive polymers. Adv. Mater. 22, 3344–3347 (2010).
https://doi.org/10.1002/adma.201002520
92. Leong, T.G., Benson, B.R., Call, E.K., Gracias, D.H.: Thin film stress driven self-folding
of microstructured containers. Small 4, 1605–1609 (2008). https://doi.org/10.1002/smll.200
800280
93. Leong, T.G., Lester, P.A., Koh, T.L., et al.: Surface tension-driven self-folding polyhedra.
Langmuir 23, 8747–8751 (2007). https://doi.org/10.1021/la700913m
94. Leong, T.G., Randall, C.L., Benson, B.R., et al.: Tetherless thermobiochemically actuated
microgrippers. Proc. Natl. Acad. Sci. U.S.A. 106, 703–708 (2009). https://doi.org/10.1073/
pnas.0807698106
95. Leong, T.G., Randall, C.L., Benson, B.R., et al.: Self-loading lithographically structured
microcontainers: 3D patterned, mobile microwells. Lab Chip 8, 1621–1624 (2008). https://
doi.org/10.1039/b809098j
96. Liu, F., Urban, M.W.: Recent advances and challenges in designing stimuli-responsive
polymers. Prog. Polym. Sci. 35, 3–23 (2010). https://doi.org/10.1016/j.progpolymsci.2009.
10.002
97. Liu, Y., Boyles, J.K., Genzer, J., Dickey, M.D.: Self-folding of polymer sheets using local
light absorption. Soft Matter 8, 1764–1769 (2012). https://doi.org/10.1039/c1sm06564e
98. Liu, Y., Miskiewicz, M., Escuti, M.J., et al.: Three-dimensional folding of pre-strained
polymer sheets via absorption of laser light. J. Appl. Phys. 115 (2014). https://doi.org/10.
1063/1.4880160