7 Micro-hole Arrays and Net-like Structure Fabrication …
231
Fig. 7.20 Drilling on coated silica and uncoated silica with different fluences of laser pulse
7.3.6 Micro-hole Arrays on the Surface of Fused Silica Sheet
The micro-hole arrays were fabricated on a fused silica sheet and an aluminum
coated-fused silica sheet, respectively. The distance between neighboring hole
centers was set to 30 μm. The laser fluence applied for the fabrication was 58.9 J/cm
2 .
The accumulated pulse numbers at each spot were controlled by the opening time of
the electronic shutter, with the opening time of the electric shutter being 2 s. After
ablation, a 10% hydrochloric acid (HCl) solution was used to clean the aluminum
film on the fused silica sheet. Subsequently, the samples were cleaned to remove the
dust deposited in the ablation area by ultrasonic bath in ethanol and deionized water
for 25 min.
Figure 7.21 shows the micro-hole arrays fabricated on the fused silica sheet [35,
36]. Figure 7.21a is a microscopic photograph of a micro-hole array pattern on silica,
Fig. 7.21b shows a micro-hole array pattern on aluminum coated silica, and there
were many burrs and debris around the holes on the fused silica coated aluminum film,
which were formed by the molten material ejected from the holes and re-solidifying
rapidly. As the insets of Fig. 7.8b show, the fused silica sheets coated with aluminum
film were used in the experiment. Figure 7.8c is a SEM image of a micro-hole array
on silica. After washing the aluminum film on the fused silica sheet (Fig. 7.21d),
the micro-holes on the fused silica sheet were very round and were neatly arranged.
The micro-holes were obviously, almost, circular. SEM image of a micro-hole in the
holes array on the fused silica sheet is shown in Fig. 7.21e. Figure 7.21f is a SEM
231
Fig. 7.20 Drilling on coated silica and uncoated silica with different fluences of laser pulse
7.3.6 Micro-hole Arrays on the Surface of Fused Silica Sheet
The micro-hole arrays were fabricated on a fused silica sheet and an aluminum
coated-fused silica sheet, respectively. The distance between neighboring hole
centers was set to 30 μm. The laser fluence applied for the fabrication was 58.9 J/cm
2 .
The accumulated pulse numbers at each spot were controlled by the opening time of
the electronic shutter, with the opening time of the electric shutter being 2 s. After
ablation, a 10% hydrochloric acid (HCl) solution was used to clean the aluminum
film on the fused silica sheet. Subsequently, the samples were cleaned to remove the
dust deposited in the ablation area by ultrasonic bath in ethanol and deionized water
for 25 min.
Figure 7.21 shows the micro-hole arrays fabricated on the fused silica sheet [35,
36]. Figure 7.21a is a microscopic photograph of a micro-hole array pattern on silica,
Fig. 7.21b shows a micro-hole array pattern on aluminum coated silica, and there
were many burrs and debris around the holes on the fused silica coated aluminum film,
which were formed by the molten material ejected from the holes and re-solidifying
rapidly. As the insets of Fig. 7.8b show, the fused silica sheets coated with aluminum
film were used in the experiment. Figure 7.8c is a SEM image of a micro-hole array
on silica. After washing the aluminum film on the fused silica sheet (Fig. 7.21d),
the micro-holes on the fused silica sheet were very round and were neatly arranged.
The micro-holes were obviously, almost, circular. SEM image of a micro-hole in the
holes array on the fused silica sheet is shown in Fig. 7.21e. Figure 7.21f is a SEM