Chapter 7
Micro-hole Arrays and Net-like
Structure Fabrication via Femtosecond
Laser Pulses
Guoying Feng, Guang Li, Zhuping Wang, and Yao Xiao
Abstract Femtosecond lasers are widely used in the fields of ultra-precision
processing, microelectronic device manufacturing, medical, high-density information storage and recording, which are characterized by a small thermal effect and
unique processing of transparent dielectric materials. In this chapter, we first theoretically analyzed the micromachining mechanism of dielectronic materials with
femtosecond laser pulses. After reviewing the laser direct fabricating of micro-hole
arrays on fused silica sheet, we focus on the latest progress of microchannels fabrication by femtosecond laser. We further discuss 3D microchannel structures to highlight
the unique manufacturing using ultrafast laser.
7.1 Introduction
Femtosecond lasers can quickly and accurately focus energy into an area to be
processed, while also quickly realize micro/nano-processing in the semiconductor,
glass, metal, polymer, ceramics, plastics, resins, and other materials [1]. Lasers of
this kind have been widely used in micro/nano-drilling, three-dimensional microchannel, waveguide, optical grating, optical memory, optical sensors, biotechnology,
chemical technology, and medical applications as well as other fields. Compared with
conventional processing methods, femtosecond laser micro/nanofabrication has the
following advantages:
1. It has a very small heat-affected zone [2, 3], so a fine “cold” process can be
achieved [4]. Due to the ultrashort timescale and the ultrahigh laser intensity
coupled to the electron system, the electrons reach a very high temperature in a
very short period of time before the electrons transfer energy to the lattice, but
the material relaxation time (heat transfer between the electrons and the lattice)
is far greater than the pulse duration of a femtosecond laser, which means that the
G. Feng (B) · G. Li · Z. Wang · Y. Xiao
Institute of Laser and Micro/Nano-Engineering, College of Electronics and Information
Engineering, Sichuan University, No. 24 South Section, 1 Yihuan Road, Cheng’du 610064, China
e-mail: guoing_feng@scu.edu.cn
© Springer Nature Switzerland AG 2020
A. Hu (ed.), Laser Micro-Nano-Manufacturing and 3D Microprinting, Springer Series
in Materials Science 309, https://doi.org/10.1007/978-3-030-59313-1_7
211
Micro-hole Arrays and Net-like
Structure Fabrication via Femtosecond
Laser Pulses
Guoying Feng, Guang Li, Zhuping Wang, and Yao Xiao
Abstract Femtosecond lasers are widely used in the fields of ultra-precision
processing, microelectronic device manufacturing, medical, high-density information storage and recording, which are characterized by a small thermal effect and
unique processing of transparent dielectric materials. In this chapter, we first theoretically analyzed the micromachining mechanism of dielectronic materials with
femtosecond laser pulses. After reviewing the laser direct fabricating of micro-hole
arrays on fused silica sheet, we focus on the latest progress of microchannels fabrication by femtosecond laser. We further discuss 3D microchannel structures to highlight
the unique manufacturing using ultrafast laser.
7.1 Introduction
Femtosecond lasers can quickly and accurately focus energy into an area to be
processed, while also quickly realize micro/nano-processing in the semiconductor,
glass, metal, polymer, ceramics, plastics, resins, and other materials [1]. Lasers of
this kind have been widely used in micro/nano-drilling, three-dimensional microchannel, waveguide, optical grating, optical memory, optical sensors, biotechnology,
chemical technology, and medical applications as well as other fields. Compared with
conventional processing methods, femtosecond laser micro/nanofabrication has the
following advantages:
1. It has a very small heat-affected zone [2, 3], so a fine “cold” process can be
achieved [4]. Due to the ultrashort timescale and the ultrahigh laser intensity
coupled to the electron system, the electrons reach a very high temperature in a
very short period of time before the electrons transfer energy to the lattice, but
the material relaxation time (heat transfer between the electrons and the lattice)
is far greater than the pulse duration of a femtosecond laser, which means that the
G. Feng (B) · G. Li · Z. Wang · Y. Xiao
Institute of Laser and Micro/Nano-Engineering, College of Electronics and Information
Engineering, Sichuan University, No. 24 South Section, 1 Yihuan Road, Cheng’du 610064, China
e-mail: guoing_feng@scu.edu.cn
© Springer Nature Switzerland AG 2020
A. Hu (ed.), Laser Micro-Nano-Manufacturing and 3D Microprinting, Springer Series
in Materials Science 309, https://doi.org/10.1007/978-3-030-59313-1_7
211