5.3 Setup of Case Studies
67
Fig. 5.1 Input mask of the Meander Designer
5.3 Setup of Case Studies
In order to confirm the compliance of the proposed Meander Designer tool, two case
studies have been conducted. These case studies evaluate whether fabrications of the
obtained designs indeed realize the desired specifications. This section describes the
applied fabrication process as well as the setup of the two conducted case studies.
5.3.1 Fabrication Process
For the fabrication, a soft lithography process was applied consisting of the master
fabrication and the chip fabrication.
67
Fig. 5.1 Input mask of the Meander Designer
5.3 Setup of Case Studies
In order to confirm the compliance of the proposed Meander Designer tool, two case
studies have been conducted. These case studies evaluate whether fabrications of the
obtained designs indeed realize the desired specifications. This section describes the
applied fabrication process as well as the setup of the two conducted case studies.
5.3.1 Fabrication Process
For the fabrication, a soft lithography process was applied consisting of the master
fabrication and the chip fabrication.