324
16 VLEED Capability and Sensitivity
Energy (eV)
x
A
B
C
A: 0.15 A
B: 0.30
C: 0.40
o
I
I
00
0
A
B
C
A
B
C
2
A: 0.03
B: 0.05
C: 0.08
A
B
C
(d) D
A: D 1
2
A
B
A
B
(b) Q
(c) DCu
(%)
0
2
4
6
8
8
6
4
2
0
B: D
8
6
4
2
0
(a) BA12
A: 107.0
B: 104.5
C: 101.0
o
o
o
A
B
C
A
B
C
A
B
C
8
6
4
2
0
7.5 10.0 12.5 15.0
7.5 10.0 12.5 15.0
7.5 10.0 12.5 15.0
7.5 10.0 12.5 15.0
Fig. 16.5 VLEED spectral sensitivity to the bond geometry [11, 12]. Table 16.2 lists the parameters
for examination. Broken lines are the reference spectrum. BA12 and Q 2 modulate the spectral
features from 7.0 to 11.0 eV, featuring the change of 25-200 L oxygen coverage. DCu x modulates
the intensity between 7.5 and 12.0 eV, matching the features at higher exposure (>200 L). DCu z
(denoted D) has very little effect on the spectrum between 10.0 and 12.0 eV, producing no match
to the measured profiles. The bond geometry or crystallography has little effect on features out of
7.0–12.5 eV or the valence band of copper. (Reprinted with permission from [11, 12])