698
M. Dohlus et al.
One driving force of Ernest Lawrence for the development of the cyclotron was
a cancer illness of his mother. Thus the possibility of treating tumors by radiation
stands at the beginning of accelerator development.
Initially the application of accelerators in industry [34, 35] was, a by-product of
fundamental research. This was because it was not needed continuously and because
radiation safety requirements were in many cases too high to make industrial
application economical.
On the other hand the installation of accelerators in special industrial laboratories
or production lines does not find much publicity and therefore information about
these accelerators is hard to obtain.
Two main lines of machine installations have to be considered (a) electron
accelerators and (b) ion accelerators.
Additionally, the accelerators can be sub-divided into machines that analyze or
modify materials. Electron microscopes are a simple example related to analysis
of materials. In addition, there is Accelerator Mass Spectrometry (AMS) which is
used to analyse samples of specific species for their applicability particularly in the
pharmaceutical industry.
Some applications belong to different fields like the production of radioactive
probes for medical application, e.g., PET (positron emission tomography) or SPECT
(single photon emission computer tomography). Such probes are industrially produced in close consultation with medical consumers.
The industrial application of synchrotron radiation for photolithographic processes is in general part of the cooperation between large research institutes with
suitable installations and relevant industrial partners: the beamtime is paid for by
the relevant industries.
11.2.2 Electron Accelerators
Electron accelerators for industrial applications [36] are classified by their energy,
focusing capability as well as by the obtainable dose. The large number of possible
applications in different industries are listed in Table 11.1 [35]. The electron
microscope is the classical low energy electron accelerator for analyzing samples.
Unfortunately, the Scherzer theorem forbids a defocussing symmetric lenses with
constant voltage. Electron microscopes with achromatic and aspherical lenses are
very challenging. In the case of electron beam processing, the incident energy
determines the maximum material thickness and the electron beam current and
power determine the maximum processing rate.
The purpose of electron irradiation is the transfer of energy doses to produce
neutral or positive charged radicals which react very rapidly with other chemical
compounds. Spin correlation plays the important role particularly for neutral
radicals. Thus the processes listed in Table 11.1 become production processes in
the different branches of industry [36]. The energy transfer rate is nearly constant
over a large energy range between 500 keV and several MeV, thus a homogeneous
M. Dohlus et al.
One driving force of Ernest Lawrence for the development of the cyclotron was
a cancer illness of his mother. Thus the possibility of treating tumors by radiation
stands at the beginning of accelerator development.
Initially the application of accelerators in industry [34, 35] was, a by-product of
fundamental research. This was because it was not needed continuously and because
radiation safety requirements were in many cases too high to make industrial
application economical.
On the other hand the installation of accelerators in special industrial laboratories
or production lines does not find much publicity and therefore information about
these accelerators is hard to obtain.
Two main lines of machine installations have to be considered (a) electron
accelerators and (b) ion accelerators.
Additionally, the accelerators can be sub-divided into machines that analyze or
modify materials. Electron microscopes are a simple example related to analysis
of materials. In addition, there is Accelerator Mass Spectrometry (AMS) which is
used to analyse samples of specific species for their applicability particularly in the
pharmaceutical industry.
Some applications belong to different fields like the production of radioactive
probes for medical application, e.g., PET (positron emission tomography) or SPECT
(single photon emission computer tomography). Such probes are industrially produced in close consultation with medical consumers.
The industrial application of synchrotron radiation for photolithographic processes is in general part of the cooperation between large research institutes with
suitable installations and relevant industrial partners: the beamtime is paid for by
the relevant industries.
11.2.2 Electron Accelerators
Electron accelerators for industrial applications [36] are classified by their energy,
focusing capability as well as by the obtainable dose. The large number of possible
applications in different industries are listed in Table 11.1 [35]. The electron
microscope is the classical low energy electron accelerator for analyzing samples.
Unfortunately, the Scherzer theorem forbids a defocussing symmetric lenses with
constant voltage. Electron microscopes with achromatic and aspherical lenses are
very challenging. In the case of electron beam processing, the incident energy
determines the maximum material thickness and the electron beam current and
power determine the maximum processing rate.
The purpose of electron irradiation is the transfer of energy doses to produce
neutral or positive charged radicals which react very rapidly with other chemical
compounds. Spin correlation plays the important role particularly for neutral
radicals. Thus the processes listed in Table 11.1 become production processes in
the different branches of industry [36]. The energy transfer rate is nearly constant
over a large energy range between 500 keV and several MeV, thus a homogeneous