facteurs de sensibilité XPS selon Scofield: F1s: 1.0
facteurs de sensibilité AES pour le CMA: réf. Physical Electronics, Eden Prairie (1992) – Logiciel MT 5.1 C adapté à Ag MNN: 1.0
Annexe 1
Tableau périodique des éléments. Energies et sensibilités des photoélectrons et électrons Auger.
1
H
14.1
Z
A T
E
L
v
S
A SAES
LMM E
cin
2
He
31.8
3
Li 1s
55
13.1
0.025 0.16
KLL 43
4
Be 1s
111
5.0
0.074 0.10
KLL 104
5
B 1s
187
4.6
0.159 0.12
KLL 179
6
C 1s
285
5.3
0.278 0.14
KLL 272
7
N 1s
397 17.3
0.477 0.24
KLL 379
8
O 1s
529
14
0.78 0.41
KLL 512
9
F 1s
685 17.1
1.0 0.49
KLL 647
10
Ne 1s
864 16.8
1.340
KLL 805
11
Na 1s
1072 23.7
1.685 0.26
KLL 990
12
Mg 2s
9.0 14.0
0.252 0.13
KLL 1186
13
Al 2p
73
10.0
0.193 0.20
LMM 68
14
Si 2p
100 12.1
0.328 0.29
LMM 92
15
P 2p
130 17.0
0.486 0.48
LMM 120
16
S 2p
164 15.5
0.666 0.77
LMM 152
17
Cl 2p
200 18.7
0.891 1.08
LMM 181
18
Ar 2p
245 24.2
1.155
LMM 215
19
K 2p
293 45.3
1.466 0.93
KLL 252
20
Ca 2p
346 29.9
1.833 0.41
LMM 291
21
Sc 2p
399 15.0
1.875 0.29
LMM 340
22
Ti 2p
454 10.6
2.001 0.35
LMM 418
23
V 2p
512 8.35
2.116 0.39
LMM 573
24
Cr 2p
574 7.23
2.427 0.32
LMM 529
25
Mn 2p
639 7.39
2.659 0.25
LMM 589
26
Fe 2p
707
7.1
2.957 0.23
LMM 703
27
Co 2p
778
6.7
3.59 0.24
LMM 775
28
Ni 2p
853
6.6
4.044 0.28
LMM 848
29
Cu 2p
933
7.1
5.321 0.24
LMM 916
30
Zn 2p
1022 9.2
5.589 0.20
LMM 994
31
Ga 2p
1116 11.8
5.581 0.16
LMM1070
32
Ge
3/2
2p
1217 13.6
3.457 0.13
LMM1147
33
As 3d
41
13.1
0.677 0.12
LMM1228
34
Se 3d
57
16.5
0.853 0.095
MNN 43
35
Br 3d
69
23.5
1.053 0.077
MNN 55
36
Kr 3d
89
32.2
1.287
MNN 53
37
Rb 3d
112 55.9
1.542 0.054
MNN 76
38
Sr 3d
134 33.7
1.843 0.04
MNN 110
39
Y 3d
156 19.8
2.175 0.11
MNN 127
40
Zr 3d
179 14.1
2.576 0.16
MNN 147
41
Nb 3d
202 10.8
2.921 0.22
MNN 167
42
Mo 3d
228
9.4
3.321 0.29
MNN 186
Tc 3d
253
3.776
44
Ru 3d
280
8.3
4.273 0.52
MNN 273
45
Rh 3d
307
8.3
4.822 0.69
MNN 302
46
Pd 3d
335
8.9
5.356 0.92
MNN 330
47
Ag 3d
368 10.3
5.987 1.0
MNN 356
48
Cd 3d
405 13.1
6.623 1.02
LMM 405
49
In 3d
444 15.7
7.265 51.0
MNN 404
50
Sn 3d
485 16.3
7.875 0.93
MNN 430
51
Sb 3d
528 18.4
8.627 0.67
MNN 454
52
Te 3d
573 20.5
9.508 0.48
MNN 483
53
I 3d
618 25.7
10.34 0.35
MNN 511
54
Xe 3d
670 42.9
11.07 0.25
MNN 532
55
Cs 3d
723
70
11.74 0.18
6.032
56
56
Ba 3d
781
39
12.45 0.12
MNN 584
57
La 3d
836 22.5
9.122 0.91
MNN 625
72
Hf 4f
14
13.6
2.639 0.15
NNN 18
73
Ta 4f
22
10.9
3.082 0.14
NNN 179
74
W 4f
31
9.53
3.523 0.12
NNN 17
75
Re 4f
40
8.85
3.961 0.10
NNN 176
76
Os 4f
51
8.43
4.461
NNN
77
Ir 4f
61
8.54
5.021 0.047
NOO 54
78
Pt 4f
71
9.10
5.575 0.29
NOO
6
79
Au 4f
84
10.2
6.250 0.35
NOO
6
80
Hg 4f
100 14.8
6.915 0.031
NOO
7
81
Tl 4f
118 17.2
8.394 0.43
NOO
8
82
Pb 4f
137 18.3
8.329 0.41
NOO
9
83
Bi 4f
157 21.3
9.140 0.38
NOO 10
84
Po 4f
184 22.7
11.013
NOO
85
At 4f
210
12.074
NOO
86
Rn 4f
238
13.109
NOO
87
Fr 4f
268
14.085
NOO
88
Ra 4f
299
45
15.02
NOO
89
Ac 4f
319
16.03
NOO
ANNEXE 1
58
Ce 3d
884 21.0
8.808 0.07
MNN 594
59
Pr 3d
932 20.8
7.627 0.057
MNN 555
60
Nd 3d
985 20.6
5.671 0.048
MNN 730
61
Pm 3d
1034
4.597
MNN
62
Sm 3d
1081 19.9
6.02 0.034
MNN 814
63
Eu 3d
1136 28.9
2.467 0.030
MNN 858
64
Gd 4d
1190 19.9
1.873 0.028
MNN 895
65
Tb 4d
148 19.2
2.477 0.027
MNN1073
66
Dy 4d
154 19.0
2.474 0.028
MNN1126
67
Ho 4d
161 18.7
2.47 0.031
MNN1175
68
Er 4d
168 18.4
2.463 0.037
MNN1393
69
Tm 4d
180 18.1
2.454 0.043
MNN 180
70
Yb 4d
184 24.8
2.451 0.053
MNN1514
71
Lu 4d
195 17.8
2.441 0.064
MNN1573
90
Th 4f
333 19.9
12.73 0.29
OPP
65
91
Pa 4f
360 15.0
OPP
92
U 4f
381 12.5
10.32 0.45
OPP
72
nombre atomique
énergie de liaison du
pic principal XPS, eV
sensibilité XPS
source Al K
α
1486.6 eV
transition Auger
élément
pic principal du photoélectron
volume atomique A/ρ en 10 –6
m 3
/mol
sensibilité du pic principal Auger (Ep = 5 keV)
énergie cinétique du pic principal Auger, eV
valable pour XPS et AES
facteurs de sensibilité AES pour le CMA: réf. Physical Electronics, Eden Prairie (1992) – Logiciel MT 5.1 C adapté à Ag MNN: 1.0
Annexe 1
Tableau périodique des éléments. Energies et sensibilités des photoélectrons et électrons Auger.
1
H
14.1
Z
A T
E
L
v
S
A SAES
LMM E
cin
2
He
31.8
3
Li 1s
55
13.1
0.025 0.16
KLL 43
4
Be 1s
111
5.0
0.074 0.10
KLL 104
5
B 1s
187
4.6
0.159 0.12
KLL 179
6
C 1s
285
5.3
0.278 0.14
KLL 272
7
N 1s
397 17.3
0.477 0.24
KLL 379
8
O 1s
529
14
0.78 0.41
KLL 512
9
F 1s
685 17.1
1.0 0.49
KLL 647
10
Ne 1s
864 16.8
1.340
KLL 805
11
Na 1s
1072 23.7
1.685 0.26
KLL 990
12
Mg 2s
9.0 14.0
0.252 0.13
KLL 1186
13
Al 2p
73
10.0
0.193 0.20
LMM 68
14
Si 2p
100 12.1
0.328 0.29
LMM 92
15
P 2p
130 17.0
0.486 0.48
LMM 120
16
S 2p
164 15.5
0.666 0.77
LMM 152
17
Cl 2p
200 18.7
0.891 1.08
LMM 181
18
Ar 2p
245 24.2
1.155
LMM 215
19
K 2p
293 45.3
1.466 0.93
KLL 252
20
Ca 2p
346 29.9
1.833 0.41
LMM 291
21
Sc 2p
399 15.0
1.875 0.29
LMM 340
22
Ti 2p
454 10.6
2.001 0.35
LMM 418
23
V 2p
512 8.35
2.116 0.39
LMM 573
24
Cr 2p
574 7.23
2.427 0.32
LMM 529
25
Mn 2p
639 7.39
2.659 0.25
LMM 589
26
Fe 2p
707
7.1
2.957 0.23
LMM 703
27
Co 2p
778
6.7
3.59 0.24
LMM 775
28
Ni 2p
853
6.6
4.044 0.28
LMM 848
29
Cu 2p
933
7.1
5.321 0.24
LMM 916
30
Zn 2p
1022 9.2
5.589 0.20
LMM 994
31
Ga 2p
1116 11.8
5.581 0.16
LMM1070
32
Ge
3/2
2p
1217 13.6
3.457 0.13
LMM1147
33
As 3d
41
13.1
0.677 0.12
LMM1228
34
Se 3d
57
16.5
0.853 0.095
MNN 43
35
Br 3d
69
23.5
1.053 0.077
MNN 55
36
Kr 3d
89
32.2
1.287
MNN 53
37
Rb 3d
112 55.9
1.542 0.054
MNN 76
38
Sr 3d
134 33.7
1.843 0.04
MNN 110
39
Y 3d
156 19.8
2.175 0.11
MNN 127
40
Zr 3d
179 14.1
2.576 0.16
MNN 147
41
Nb 3d
202 10.8
2.921 0.22
MNN 167
42
Mo 3d
228
9.4
3.321 0.29
MNN 186
Tc 3d
253
3.776
44
Ru 3d
280
8.3
4.273 0.52
MNN 273
45
Rh 3d
307
8.3
4.822 0.69
MNN 302
46
Pd 3d
335
8.9
5.356 0.92
MNN 330
47
Ag 3d
368 10.3
5.987 1.0
MNN 356
48
Cd 3d
405 13.1
6.623 1.02
LMM 405
49
In 3d
444 15.7
7.265 51.0
MNN 404
50
Sn 3d
485 16.3
7.875 0.93
MNN 430
51
Sb 3d
528 18.4
8.627 0.67
MNN 454
52
Te 3d
573 20.5
9.508 0.48
MNN 483
53
I 3d
618 25.7
10.34 0.35
MNN 511
54
Xe 3d
670 42.9
11.07 0.25
MNN 532
55
Cs 3d
723
70
11.74 0.18
6.032
56
56
Ba 3d
781
39
12.45 0.12
MNN 584
57
La 3d
836 22.5
9.122 0.91
MNN 625
72
Hf 4f
14
13.6
2.639 0.15
NNN 18
73
Ta 4f
22
10.9
3.082 0.14
NNN 179
74
W 4f
31
9.53
3.523 0.12
NNN 17
75
Re 4f
40
8.85
3.961 0.10
NNN 176
76
Os 4f
51
8.43
4.461
NNN
77
Ir 4f
61
8.54
5.021 0.047
NOO 54
78
Pt 4f
71
9.10
5.575 0.29
NOO
6
79
Au 4f
84
10.2
6.250 0.35
NOO
6
80
Hg 4f
100 14.8
6.915 0.031
NOO
7
81
Tl 4f
118 17.2
8.394 0.43
NOO
8
82
Pb 4f
137 18.3
8.329 0.41
NOO
9
83
Bi 4f
157 21.3
9.140 0.38
NOO 10
84
Po 4f
184 22.7
11.013
NOO
85
At 4f
210
12.074
NOO
86
Rn 4f
238
13.109
NOO
87
Fr 4f
268
14.085
NOO
88
Ra 4f
299
45
15.02
NOO
89
Ac 4f
319
16.03
NOO
ANNEXE 1
58
Ce 3d
884 21.0
8.808 0.07
MNN 594
59
Pr 3d
932 20.8
7.627 0.057
MNN 555
60
Nd 3d
985 20.6
5.671 0.048
MNN 730
61
Pm 3d
1034
4.597
MNN
62
Sm 3d
1081 19.9
6.02 0.034
MNN 814
63
Eu 3d
1136 28.9
2.467 0.030
MNN 858
64
Gd 4d
1190 19.9
1.873 0.028
MNN 895
65
Tb 4d
148 19.2
2.477 0.027
MNN1073
66
Dy 4d
154 19.0
2.474 0.028
MNN1126
67
Ho 4d
161 18.7
2.47 0.031
MNN1175
68
Er 4d
168 18.4
2.463 0.037
MNN1393
69
Tm 4d
180 18.1
2.454 0.043
MNN 180
70
Yb 4d
184 24.8
2.451 0.053
MNN1514
71
Lu 4d
195 17.8
2.441 0.064
MNN1573
90
Th 4f
333 19.9
12.73 0.29
OPP
65
91
Pa 4f
360 15.0
OPP
92
U 4f
381 12.5
10.32 0.45
OPP
72
nombre atomique
énergie de liaison du
pic principal XPS, eV
sensibilité XPS
source Al K
α
1486.6 eV
transition Auger
élément
pic principal du photoélectron
volume atomique A/ρ en 10 –6
m 3
/mol
sensibilité du pic principal Auger (Ep = 5 keV)
énergie cinétique du pic principal Auger, eV
valable pour XPS et AES