Topographie et épaisseur des couches minces
19
2.7 BIBLIOGRAPHIE
Générale
D.E. ASPNES, Spectroscopic Ellipsometry of Solids, in Optical Properties of Solids: New Developments, B.O. Seraphin, Editor, North-Holland, Amsterdam, p. 800, 1976.
R.H. MULLER, Principles of Ellipsometry, in Advances in Electrochemistry and Electrochemical
Engineering, P. Delahy and C.W. Tobias, Editors, John Wiley & Sons, New York, p. 167, 1973.
K.J. STOUT, ed. Three Dimensional Surface Topographiy; Measurement, Interpretation and Applications – A Survey and Bibliography, London and Bristol, Penton Press, 1994.
Références
[2.1] MATHIEU H.J., D.E. MCCLURE, et R.H. MULLER, Fast Self-Compensating Ellipsometer, Rev.
Sci. Instr., 45, pp. 798-802, 1974.
[2.2] MULLER R.H., Ellipsometry as an in Situ Probe for the Study of Electrode Processes, in Techniques for Characterization of Electrodes and Electrochemical Processes, R. Varma and
J.R. Selman, Editors, John Wiley & Sons, New York, pp. 31-126, 1991.
19
2.7 BIBLIOGRAPHIE
Générale
D.E. ASPNES, Spectroscopic Ellipsometry of Solids, in Optical Properties of Solids: New Developments, B.O. Seraphin, Editor, North-Holland, Amsterdam, p. 800, 1976.
R.H. MULLER, Principles of Ellipsometry, in Advances in Electrochemistry and Electrochemical
Engineering, P. Delahy and C.W. Tobias, Editors, John Wiley & Sons, New York, p. 167, 1973.
K.J. STOUT, ed. Three Dimensional Surface Topographiy; Measurement, Interpretation and Applications – A Survey and Bibliography, London and Bristol, Penton Press, 1994.
Références
[2.1] MATHIEU H.J., D.E. MCCLURE, et R.H. MULLER, Fast Self-Compensating Ellipsometer, Rev.
Sci. Instr., 45, pp. 798-802, 1974.
[2.2] MULLER R.H., Ellipsometry as an in Situ Probe for the Study of Electrode Processes, in Techniques for Characterization of Electrodes and Electrochemical Processes, R. Varma and
J.R. Selman, Editors, John Wiley & Sons, New York, pp. 31-126, 1991.