vii
Contents
Preface .....................................................................................................................xv
Author ................................................................................................................... xix
1. Introduction to Compact Models ................................................................1
1.1 Compact Models for Circuit Simulation ............................................1
1.1.1 Compact Device Models .........................................................2
1.1.2 Compact Interconnect Models ...............................................3
1.2 Brief History of Compact Device Modeling ......................................4
1.2.1 Early History of Compact MOSFET Modeling ....................4
1.2.2 Recent History of Compact MOSFET Modeling ................. 7
1.2.2.1 Threshold Voltage–Based Compact
MOSFET Modeling .................................................. 7
1.2.2.2 Surface Potential–Based Compact MOSFET
Modeling ...................................................................9
1.2.2.3 Charge-Based Compact MOSFET Modeling ...... 12
1.3 Motivation for Compact Modeling ................................................... 15
1.4 Compact Model Usage ....................................................................... 16
1.5 Compact Model Standardization ...................................................... 17
1.6 Summary .............................................................................................. 17
Exercises .......................................................................................................... 18
2. Review of Basic Device Physics ................................................................. 19
2.1 Introduction ......................................................................................... 19
2.2 Semiconductor Physics ....................................................................... 19
2.2.1 Energy Band Model ............................................................... 20
2.2.2 Carrier Statistics ..................................................................... 21
2.2.3 Intrinsic Semiconductors ...................................................... 23
2.2.3.1 Intrinsic Carrier Concentration ............................ 24
2.2.3.2 Effective Mass of Electrons and Holes ................ 25
2.2.4 Extrinsic Semiconductors ..................................................... 26
2.2.4.1 Fermi Level in Extrinsic Semiconductor ............. 28
2.2.4.2 Fermi Level in Degenerately Doped
Semiconductor ........................................................30
2.2.5 Carrier Transport in Semiconductors ................................. 31
2.2.5.1 Carrier Mobility and Drift Current ..................... 31
2.2.5.2 Electrical Resistivity ............................................... 33
2.2.5.3 Sheet Resistance ......................................................34
2.2.5.4 Velocity Saturation ................................................. 35
Contents
Preface .....................................................................................................................xv
Author ................................................................................................................... xix
1. Introduction to Compact Models ................................................................1
1.1 Compact Models for Circuit Simulation ............................................1
1.1.1 Compact Device Models .........................................................2
1.1.2 Compact Interconnect Models ...............................................3
1.2 Brief History of Compact Device Modeling ......................................4
1.2.1 Early History of Compact MOSFET Modeling ....................4
1.2.2 Recent History of Compact MOSFET Modeling ................. 7
1.2.2.1 Threshold Voltage–Based Compact
MOSFET Modeling .................................................. 7
1.2.2.2 Surface Potential–Based Compact MOSFET
Modeling ...................................................................9
1.2.2.3 Charge-Based Compact MOSFET Modeling ...... 12
1.3 Motivation for Compact Modeling ................................................... 15
1.4 Compact Model Usage ....................................................................... 16
1.5 Compact Model Standardization ...................................................... 17
1.6 Summary .............................................................................................. 17
Exercises .......................................................................................................... 18
2. Review of Basic Device Physics ................................................................. 19
2.1 Introduction ......................................................................................... 19
2.2 Semiconductor Physics ....................................................................... 19
2.2.1 Energy Band Model ............................................................... 20
2.2.2 Carrier Statistics ..................................................................... 21
2.2.3 Intrinsic Semiconductors ...................................................... 23
2.2.3.1 Intrinsic Carrier Concentration ............................ 24
2.2.3.2 Effective Mass of Electrons and Holes ................ 25
2.2.4 Extrinsic Semiconductors ..................................................... 26
2.2.4.1 Fermi Level in Extrinsic Semiconductor ............. 28
2.2.4.2 Fermi Level in Degenerately Doped
Semiconductor ........................................................30
2.2.5 Carrier Transport in Semiconductors ................................. 31
2.2.5.1 Carrier Mobility and Drift Current ..................... 31
2.2.5.2 Electrical Resistivity ............................................... 33
2.2.5.3 Sheet Resistance ......................................................34
2.2.5.4 Velocity Saturation ................................................. 35
