84
I. E. Ivanov et al.
parameters of two-phase medium and distribution of these parameters along the axis
of symmetry are obtained.
Acknowledgements The reported study was funded by RFBR, project number 19-31-90130.
References
1. Khanna, S.N., Linderoth, S.: Magnetic behavior of clusters of ferromagnetic transition metals.
Phys. Rev. Lett. 67(6), 742–745 (1991)
2. Yamada, I., Takaoka, H., Usui, H., Takagi, T.: Low temperature epitaxy by ionized-cluster
beam. J. Vac. Sci. Technol. A 4, 722–727 (1986)
3. Gruber, A., Gspann, J., Hoffmann, H.: Nanostructures produced by cluster beam lithography.
Appl. Phys. 68, 197–201 (1999)
4. Ieshkin, A.E., Kireev, D.S., Ermakov, Yu.A., Trifonov, A.S., Presnov, D.E., Garshev, A.V.,
Anufriev, Yu.V., Prokhorova, I.G., Krupenin, V.A., Chernysh, V.S.: The quantitative analysis
of silicon carbide surface smoothing by Ar and Xe cluster ions. Nucl. Instr. Methods Phys.
Res. B 421, 27–31 (2018)
5. Ieshkin, A., Ermakov, Y., Chernysh, V., Ivanov, I.E., Kryukov, I.A., Alekseev, K., Kargin, N.,
Insepov, Z.: Computer simulation and visualization of supersonic jet for Gas cluster equipment.
Nucl. Instrum. Methods Phys. Res., Sect. A 795, 395–398 (2015)
6. Karpenko, A.Ju., Baturin, V.A.: Cluster beam sources. Part 1. Methods of cluster beams
generation. J. Nano Electron. Phys. 4, 03015.1–03015.13 (2012) (in Russian)
7. Karpenko, A.Ju., Baturin, V.A.: Cluster beam sources. Part 2. The formation of cluster beams
in nozzle sources. J. Nano Electron. Phys. 4(4), 04015.1–04015.15 (2012) (in Russian)
8. Bykov, N.Y., Gorbachev, Yu.E.: Cluster formation in copper vapor jet expanding into vacuum:
the direct simulation Monte Carlo. Vacuum 163, 119–127 (2019)
9. Bykov, N.Y., Gorbachev, Yu.E.: Mathematical models of water nucleation process for the direct
simulation Monte Carlo method. Appl. Math. Comput. 296, 215–232 (2017)
10. Bykov, N.Y., Safonov, A.I., Leshchev, D.V., Starinskiy, S.V., Bulgakov, A.V.: Gas-jet method
of metal film deposition: direct simulation Monte-Carlo of He-Ag mixture flow. Mater. Phys.
Mech. 38, 119–130 (2018)
11. Volkov, V.A., Muslaev, A.V., Pirumov, U.G., Rozovskij, P.V.: Nonequilibrium condensation
of metal vapors/inert gas mixture during expansion through the nozzles of cluster-beam
generators. Fluid Dyn. 30, 399–408 (1995)
12. Egorov, B.V., Markachev, Yu.E., Plekhanov, E.A.: Quasi-chemical model of water vapor
nucleation. Russ. J. Phys. Chem. B (Khimicheskaya Fizika) 25(4), 61–70 (2006) (in Russian)
13. Kortsenshtein, N.M., Samuilov, E.V., Yastrebov, A.K.: Study of the volume condensation
process in supersaturated vapor by the direct numerical solution of the kinetic equation for
the droplet size distribution function. Colloid J. 69(4), 450–457 (2007)
14. Gidaspov, V.U., Ivanov, I.E., Kryukov, I.A., Nazarov, V.S., Malashin, F.A.: Study of the condensation process in nozzles with a large degree of expansion. Phys.-Chem. Kinet. Gas Dyn. 19(2),
737.1–737.17 (2018) (in Russian)
15. van Putten, D.S., Sidin, R.S.R., Hagmeijer, R.: Efficient approximation of the cluster size
distribution in binary condensation (online no 184511). J. Chem. Phys. 132(18), 1–9 (2010)
16. Muitjens, M.J.E.H.: Homogeneous condensation in a vapour/gas mixture at high pressures in
an expansion cloud chamber. Eindhoven: Technische Universiteit Eindhoven. https://doi.org/
10.6100/IR471316 (1996)
17. Becker, R., Döring, W.: Kinetische behandlung der Keimbildung in ubersattingten damfen.
Ann. Phys. 24, 719–752 (1935)
I. E. Ivanov et al.
parameters of two-phase medium and distribution of these parameters along the axis
of symmetry are obtained.
Acknowledgements The reported study was funded by RFBR, project number 19-31-90130.
References
1. Khanna, S.N., Linderoth, S.: Magnetic behavior of clusters of ferromagnetic transition metals.
Phys. Rev. Lett. 67(6), 742–745 (1991)
2. Yamada, I., Takaoka, H., Usui, H., Takagi, T.: Low temperature epitaxy by ionized-cluster
beam. J. Vac. Sci. Technol. A 4, 722–727 (1986)
3. Gruber, A., Gspann, J., Hoffmann, H.: Nanostructures produced by cluster beam lithography.
Appl. Phys. 68, 197–201 (1999)
4. Ieshkin, A.E., Kireev, D.S., Ermakov, Yu.A., Trifonov, A.S., Presnov, D.E., Garshev, A.V.,
Anufriev, Yu.V., Prokhorova, I.G., Krupenin, V.A., Chernysh, V.S.: The quantitative analysis
of silicon carbide surface smoothing by Ar and Xe cluster ions. Nucl. Instr. Methods Phys.
Res. B 421, 27–31 (2018)
5. Ieshkin, A., Ermakov, Y., Chernysh, V., Ivanov, I.E., Kryukov, I.A., Alekseev, K., Kargin, N.,
Insepov, Z.: Computer simulation and visualization of supersonic jet for Gas cluster equipment.
Nucl. Instrum. Methods Phys. Res., Sect. A 795, 395–398 (2015)
6. Karpenko, A.Ju., Baturin, V.A.: Cluster beam sources. Part 1. Methods of cluster beams
generation. J. Nano Electron. Phys. 4, 03015.1–03015.13 (2012) (in Russian)
7. Karpenko, A.Ju., Baturin, V.A.: Cluster beam sources. Part 2. The formation of cluster beams
in nozzle sources. J. Nano Electron. Phys. 4(4), 04015.1–04015.15 (2012) (in Russian)
8. Bykov, N.Y., Gorbachev, Yu.E.: Cluster formation in copper vapor jet expanding into vacuum:
the direct simulation Monte Carlo. Vacuum 163, 119–127 (2019)
9. Bykov, N.Y., Gorbachev, Yu.E.: Mathematical models of water nucleation process for the direct
simulation Monte Carlo method. Appl. Math. Comput. 296, 215–232 (2017)
10. Bykov, N.Y., Safonov, A.I., Leshchev, D.V., Starinskiy, S.V., Bulgakov, A.V.: Gas-jet method
of metal film deposition: direct simulation Monte-Carlo of He-Ag mixture flow. Mater. Phys.
Mech. 38, 119–130 (2018)
11. Volkov, V.A., Muslaev, A.V., Pirumov, U.G., Rozovskij, P.V.: Nonequilibrium condensation
of metal vapors/inert gas mixture during expansion through the nozzles of cluster-beam
generators. Fluid Dyn. 30, 399–408 (1995)
12. Egorov, B.V., Markachev, Yu.E., Plekhanov, E.A.: Quasi-chemical model of water vapor
nucleation. Russ. J. Phys. Chem. B (Khimicheskaya Fizika) 25(4), 61–70 (2006) (in Russian)
13. Kortsenshtein, N.M., Samuilov, E.V., Yastrebov, A.K.: Study of the volume condensation
process in supersaturated vapor by the direct numerical solution of the kinetic equation for
the droplet size distribution function. Colloid J. 69(4), 450–457 (2007)
14. Gidaspov, V.U., Ivanov, I.E., Kryukov, I.A., Nazarov, V.S., Malashin, F.A.: Study of the condensation process in nozzles with a large degree of expansion. Phys.-Chem. Kinet. Gas Dyn. 19(2),
737.1–737.17 (2018) (in Russian)
15. van Putten, D.S., Sidin, R.S.R., Hagmeijer, R.: Efficient approximation of the cluster size
distribution in binary condensation (online no 184511). J. Chem. Phys. 132(18), 1–9 (2010)
16. Muitjens, M.J.E.H.: Homogeneous condensation in a vapour/gas mixture at high pressures in
an expansion cloud chamber. Eindhoven: Technische Universiteit Eindhoven. https://doi.org/
10.6100/IR471316 (1996)
17. Becker, R., Döring, W.: Kinetische behandlung der Keimbildung in ubersattingten damfen.
Ann. Phys. 24, 719–752 (1935)