Chapter 6
The Investigation of the Evolution
of Cluster Beam Development
in the Nozzle-Skimmer System
Igor E. Ivanov , Vladislav S. Nazarov , and Igor A. Kryukov
Abstract The device skimmer is considered, which is intended to separate inert gas
clusters with the aim of further collision them with a surface to increase its smoothness order. The condensation and the evaporation processes of Argon in the device are
calculated. The modified method of moments (MM) is used for modeling. The droplet
nucleation and growth rate coefficients were found by the semi-empirical model.
Two-dimensional viscous axisymmetric case is considered. The moment equations
are supplemented by the diffusion equation of a condensing gas. To solve the equations, the finite volume method is used. The Riemann problem is solved using the
AUSM+ method.
6.1 Introduction
Molecular clusters are widely used to produce new materials [1], deposit thin films
on the surfaces [2], and influence surfaces by collision them with a cluster beam
[3]. To obtain clusters from gas vapors, it is convenient to use a supersonic gas
outflow from a nozzle. The resulting clusters are supposed to be used to bombard the
surface of integrated circuits to achieve its greater order of smoothness. However,
I. E. Ivanov · V. S. Nazarov (B)
Moscow Aviation Institute (National Research University), 4, Volokolamskoe shosse, Moscow
125993, Russian Federation
e-mail: naz.vladislav@yandex.ru
I. E. Ivanov
e-mail: ivanovmai@gmail.com
I. E. Ivanov
Federal State Budget Educational Institution of Higher Education M.V. Lomonosov Moscow State
University (Lomonosov MSU), 1, Leninskie Gory, Moscow 119991, Russian Federation
I. A. Kryukov
Ishlinsky Institute for Problems in Mechanics of the RAS, 01-1, Pr. Vernadskogo, Moscow
119526, Russian Federation
e-mail: ikryukov@gmail.com
© The Author(s), under exclusive license to Springer Nature Singapore Pte Ltd. 2021
L. C. Jain et al. (eds.), Applied Mathematics and Computational Mechanics for Smart
Applications, Smart Innovation, Systems and Technologies 217,
https://doi.org/10.1007/978-981-33-4826-4_6
69
The Investigation of the Evolution
of Cluster Beam Development
in the Nozzle-Skimmer System
Igor E. Ivanov , Vladislav S. Nazarov , and Igor A. Kryukov
Abstract The device skimmer is considered, which is intended to separate inert gas
clusters with the aim of further collision them with a surface to increase its smoothness order. The condensation and the evaporation processes of Argon in the device are
calculated. The modified method of moments (MM) is used for modeling. The droplet
nucleation and growth rate coefficients were found by the semi-empirical model.
Two-dimensional viscous axisymmetric case is considered. The moment equations
are supplemented by the diffusion equation of a condensing gas. To solve the equations, the finite volume method is used. The Riemann problem is solved using the
AUSM+ method.
6.1 Introduction
Molecular clusters are widely used to produce new materials [1], deposit thin films
on the surfaces [2], and influence surfaces by collision them with a cluster beam
[3]. To obtain clusters from gas vapors, it is convenient to use a supersonic gas
outflow from a nozzle. The resulting clusters are supposed to be used to bombard the
surface of integrated circuits to achieve its greater order of smoothness. However,
I. E. Ivanov · V. S. Nazarov (B)
Moscow Aviation Institute (National Research University), 4, Volokolamskoe shosse, Moscow
125993, Russian Federation
e-mail: naz.vladislav@yandex.ru
I. E. Ivanov
e-mail: ivanovmai@gmail.com
I. E. Ivanov
Federal State Budget Educational Institution of Higher Education M.V. Lomonosov Moscow State
University (Lomonosov MSU), 1, Leninskie Gory, Moscow 119991, Russian Federation
I. A. Kryukov
Ishlinsky Institute for Problems in Mechanics of the RAS, 01-1, Pr. Vernadskogo, Moscow
119526, Russian Federation
e-mail: ikryukov@gmail.com
© The Author(s), under exclusive license to Springer Nature Singapore Pte Ltd. 2021
L. C. Jain et al. (eds.), Applied Mathematics and Computational Mechanics for Smart
Applications, Smart Innovation, Systems and Technologies 217,
https://doi.org/10.1007/978-981-33-4826-4_6
69