104
R. Chen et al.
137. Mouat AR, George C, Kobayashi T et al (2015) Highly dispersed SiO x /Al 2 O 3 catalysts
illuminate the reactivity of isolated silanol sites. Angew Chem Int Ed 54:13346–13351
138. Kytökivi A, Jacobs JP, Hakuli A et al (1996) Surface characteristics and activity of
chromia/alumina catalysts prepared by atomic layer epitaxy. J Catal 162:190–197
139. Damyanov D, Mehandjiev D, Obretenoy Ts (1975) Preparation of chromium oxides on the
surface of silica gel by the method of molecular deposition. Heterogeneous Catalysis, Varna,
pp 191–195
140. Lu J, Liu B, Greeley JP et al (2012) Porous alumina protective coatings on palladium
nanoparticles by self-poisoned atomic layer deposition. Chem Mater 24:2047–2055
141. Lu J, Liu B, Guisinger NP et al (2014) First-principles predictions and in situ experimental
validation of alumina atomic layer deposition on metal surfaces. Chem Mater 26:6752–6761
142. Deng S, Kurttepeli M, Cott DJ, Bals S, Detavernier C (2015) Porous nanostructured metal
oxides synthesized through atomic layer deposition on a carbonaceous template followed by
calcination. J Mater Chem A 3:2642–2649
143. Liang X, Li J, Yu M, McMurray CN, Falconer JL, Weimer AW (2011) Stabilization of
supported metal nanoparticles using an ultrathin porous shell. ACS Catal 1:1162–1165
144. Wen Y, Cai J, Zhang J et al (2018) Edge-selective growth of MCp2 (M=Fe Co, and Ni) precursors on pt nanoparticles in atomic layer deposition: a combined theoretical and experimental
study. Chem Mater 31:101–111
145. Ray NA, Van DRP, Stair PC (2012) Synthesis strategy for protected metal nanoparticles. J
Phys Chem C 116:7748–7756
146. Cheng N, Banis MN, Liu J et al (2015) Extremely stable platinum nanoparticles encapsulated
in a zirconia nanocage by area-selective atomic layer deposition for the oxygen reduction
reaction. Adv Mater 27:277–281
147. Xu D, Wu BS, Ren PJ et al (2017) Controllable deposition of Pt nanoparticles into a KL
zeolite by atomic layer deposition for highly efficient reforming of n-heptane to aromatics.
Catal Sci Technol 7:1342–1350
148. Gao Z, Qin Y (20157) Design and properties of confined nanocatalysts by atomic layer
deposition. Accounts Chem Res 50:2309–2316
149. King DM, Spencer JA, Liang X et al (2007) Atomic layer deposition on particles using a
fluidized bed reactor with in situ mass spectrometry. Surf Coat Technol 201:9163–9171
150. Azizpour H, Talebi M, Tichelaar FD et al (2017) Effective coating of titania nanoparticles
with alumina via atomic layer deposition. Appl Surf Sci 426:480–496
151. Rauwel E, Nilsen O, Rauwel P et al (2012) Oxide coating of alumina nanoporous structure
using ALD to produce highly porous spinel. Chem Vap Deposition 18:315–325
152. Soria-Hoyo C, Valverde JM, Van Ommen JR et al (2015) Synthesis of a nanosilica supported
CO 2 sorbent in a fluidized bed reactor. Appl Surf Sci 328:548–553
153. Mccormick JA, Cloutier BL, Weimer AW et al (2007) Rotary reactor for atomic layer
deposition on large quantities of nanoparticles. J Vac Sci Technol, A 25:67–74
154. Manandhar K, Wollmershauser JA, Boercker JE et al (2016) Growth per cycle of alumina
atomic layer deposition on nano- and micro-powders. J Vac Sci Technol, A 34:021519
155. Seong S, Jung YC, Lee T et al (2016) Fabrication of Fe 3 O 4 -ZnO core-shell nanoparticles
by rotational atomic layer deposition and their multi-functional properties. Curr Appl Phys
16:1564–1570
156. Longrie D, Deduytsche D, Haemers J et al (2012) A rotary reactor for thermal and plasmaenhanced atomic layer deposition on powders and small objects. Surf Coat Technol 213:183–
191
157. Duan C-L, Liu X, Shan B et al (2015) Fluidized bed coupled rotary reactor for nanoparticles
coating via atomic layer deposition. Rev Sci Instrum 86:075101
158. Van Ommen JR, Kooijman D, Niet MD et al (2015) Continuous production of nanostructured
particles using spatial atomic layer deposition. J Vac Sci Technol, A 33(2):021513
159. Spencer IJA, Hall RA (2018) U.S. Patent Application No. 15/737023
160. Elam JW, Yanguas-gil A, Libera JA (2017) U.S. Patent Application No. 15/426789
R. Chen et al.
137. Mouat AR, George C, Kobayashi T et al (2015) Highly dispersed SiO x /Al 2 O 3 catalysts
illuminate the reactivity of isolated silanol sites. Angew Chem Int Ed 54:13346–13351
138. Kytökivi A, Jacobs JP, Hakuli A et al (1996) Surface characteristics and activity of
chromia/alumina catalysts prepared by atomic layer epitaxy. J Catal 162:190–197
139. Damyanov D, Mehandjiev D, Obretenoy Ts (1975) Preparation of chromium oxides on the
surface of silica gel by the method of molecular deposition. Heterogeneous Catalysis, Varna,
pp 191–195
140. Lu J, Liu B, Greeley JP et al (2012) Porous alumina protective coatings on palladium
nanoparticles by self-poisoned atomic layer deposition. Chem Mater 24:2047–2055
141. Lu J, Liu B, Guisinger NP et al (2014) First-principles predictions and in situ experimental
validation of alumina atomic layer deposition on metal surfaces. Chem Mater 26:6752–6761
142. Deng S, Kurttepeli M, Cott DJ, Bals S, Detavernier C (2015) Porous nanostructured metal
oxides synthesized through atomic layer deposition on a carbonaceous template followed by
calcination. J Mater Chem A 3:2642–2649
143. Liang X, Li J, Yu M, McMurray CN, Falconer JL, Weimer AW (2011) Stabilization of
supported metal nanoparticles using an ultrathin porous shell. ACS Catal 1:1162–1165
144. Wen Y, Cai J, Zhang J et al (2018) Edge-selective growth of MCp2 (M=Fe Co, and Ni) precursors on pt nanoparticles in atomic layer deposition: a combined theoretical and experimental
study. Chem Mater 31:101–111
145. Ray NA, Van DRP, Stair PC (2012) Synthesis strategy for protected metal nanoparticles. J
Phys Chem C 116:7748–7756
146. Cheng N, Banis MN, Liu J et al (2015) Extremely stable platinum nanoparticles encapsulated
in a zirconia nanocage by area-selective atomic layer deposition for the oxygen reduction
reaction. Adv Mater 27:277–281
147. Xu D, Wu BS, Ren PJ et al (2017) Controllable deposition of Pt nanoparticles into a KL
zeolite by atomic layer deposition for highly efficient reforming of n-heptane to aromatics.
Catal Sci Technol 7:1342–1350
148. Gao Z, Qin Y (20157) Design and properties of confined nanocatalysts by atomic layer
deposition. Accounts Chem Res 50:2309–2316
149. King DM, Spencer JA, Liang X et al (2007) Atomic layer deposition on particles using a
fluidized bed reactor with in situ mass spectrometry. Surf Coat Technol 201:9163–9171
150. Azizpour H, Talebi M, Tichelaar FD et al (2017) Effective coating of titania nanoparticles
with alumina via atomic layer deposition. Appl Surf Sci 426:480–496
151. Rauwel E, Nilsen O, Rauwel P et al (2012) Oxide coating of alumina nanoporous structure
using ALD to produce highly porous spinel. Chem Vap Deposition 18:315–325
152. Soria-Hoyo C, Valverde JM, Van Ommen JR et al (2015) Synthesis of a nanosilica supported
CO 2 sorbent in a fluidized bed reactor. Appl Surf Sci 328:548–553
153. Mccormick JA, Cloutier BL, Weimer AW et al (2007) Rotary reactor for atomic layer
deposition on large quantities of nanoparticles. J Vac Sci Technol, A 25:67–74
154. Manandhar K, Wollmershauser JA, Boercker JE et al (2016) Growth per cycle of alumina
atomic layer deposition on nano- and micro-powders. J Vac Sci Technol, A 34:021519
155. Seong S, Jung YC, Lee T et al (2016) Fabrication of Fe 3 O 4 -ZnO core-shell nanoparticles
by rotational atomic layer deposition and their multi-functional properties. Curr Appl Phys
16:1564–1570
156. Longrie D, Deduytsche D, Haemers J et al (2012) A rotary reactor for thermal and plasmaenhanced atomic layer deposition on powders and small objects. Surf Coat Technol 213:183–
191
157. Duan C-L, Liu X, Shan B et al (2015) Fluidized bed coupled rotary reactor for nanoparticles
coating via atomic layer deposition. Rev Sci Instrum 86:075101
158. Van Ommen JR, Kooijman D, Niet MD et al (2015) Continuous production of nanostructured
particles using spatial atomic layer deposition. J Vac Sci Technol, A 33(2):021513
159. Spencer IJA, Hall RA (2018) U.S. Patent Application No. 15/737023
160. Elam JW, Yanguas-gil A, Libera JA (2017) U.S. Patent Application No. 15/426789